发明公开
- 专利标题: Heterojunction pin photodiode
- 专利标题(中): 异质结PIN光电二极管
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申请号: EP97105610.6申请日: 1997-04-04
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公开(公告)号: EP0800219A2公开(公告)日: 1997-10-08
- 发明人: Ishibashi, Tadao , Furuta, Tomofumi , Shimizu, Naofumi , Nagata, Koichi , Matsuoka, Yutaka , Tomizawa, Masaaki
- 申请人: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- 申请人地址: 19-2 Nishi-Shinjuku 3-chome Shinjuku-ku, Tokyo 163-19 JP
- 专利权人: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- 当前专利权人: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- 当前专利权人地址: 19-2 Nishi-Shinjuku 3-chome Shinjuku-ku, Tokyo 163-19 JP
- 代理机构: Ritter und Edler von Fischern, Bernhard, Dipl.-Ing.
- 优先权: JP83704/96 19960405; JP28682/97 19970213
- 主分类号: H01L31/105
- IPC分类号: H01L31/105 ; H01L31/109
摘要:
A hetrajunction pin photodiode having a structure capable of high frequency response and saturation output current. The pin photodiode is formed by: a first semiconductor layer (11) of a first conduction type; a second semiconductor layer (12) of a second conduction type; a third semiconductor layer (13) sandwiched between the first and second semiconductor layers, having a doping concentration lower than those of the first and second semiconductor layers; a fourth semiconductor layer (14) of the first conduction type, provided at one side of the first semiconductor layer opposite to a side at which the third semiconductor layer is provided; and a cathode electrode (16) and an anode electrode (15) connected directly or indirectly to the second semiconductor layer (12) and the fourth semiconductor layer (14), respectively. The first semiconductor layer (11) has a bandgap energy by which a charge neutrality condition is maintained in at least a part of the first semiconductor layer and the first semiconductor layer is made to function as a light absorption layer, while the second and third semiconductor layers (12,13) have bandgap energies by which the second and third semiconductor layers are made not to function as a light absorption layer, and the fourth semiconductor layer (14) has a bandgap energy greater than that of the first semiconductor layer.
公开/授权文献
- EP0800219B1 Heterojunction pin photodiode 公开/授权日:2002-07-24
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