发明公开
- 专利标题： Fluid control device
- 专利标题（中）： 流体控制设备
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申请号： EP97107532.0申请日： 1997-05-07
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公开(公告)号： EP0806573A3公开(公告)日： 1999-07-07
- 发明人: Ohmi, Tadahiro , Hirao, Keiji c/o Fujikin Incorporated , Minai, Yukio, c/o kin Incorporated , Yamaji, Michio, c/o Fujikin Incorporated , Hirose, Takashi, c/o Fujikin Incorporated , Ikeda, Nobukazu, c/o Fujikin Incorporated
- 申请人： Ohmi, Tadahiro , FUJIKIN INCORPORATED
- 申请人地址： 2-1-17-301, Komegafukuro, Aoba-ku Sendai-shi, Miyagi JP
- 专利权人： Ohmi, Tadahiro,FUJIKIN INCORPORATED
- 当前专利权人： Ohmi, Tadahiro,FUJIKIN INCORPORATED
- 当前专利权人地址： 2-1-17-301, Komegafukuro, Aoba-ku Sendai-shi, Miyagi JP
- 代理机构： Paul, Dieter-Alfred, Dipl.-Ing.
- 优先权： JP116204/96 19960510
- 主分类号： F15B13/02
- IPC分类号： F15B13/02 ; F15B13/08 ; F16K27/00
摘要：
A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.
公开/授权文献
- EP0806573B1 Fluid control device 公开/授权日：2004-02-04
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