发明公开
- 专利标题: A complementary electrostatic driving apparatus for a micro-actuator
- 专利标题(中): 用于微致动器的互补静电驱动装置
-
申请号: EP97308763.8申请日: 1997-10-31
-
公开(公告)号: EP0840092A3公开(公告)日: 1999-02-17
- 发明人: Lee, Byeung-Leul, 325-702 Woosung Apt. , Oh, Yong-soo , Song, Ci-moo
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: 416 Maetan-dong, Paldal-gu Suwon City, Kyungki-do KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: 416 Maetan-dong, Paldal-gu Suwon City, Kyungki-do KR
- 代理机构: Finnie, Peter John
- 优先权: KR9651461 19961031
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
An electrostatic driving apparatus for a microactuator is provided in which to prevent an excitation signal from being mixed with a sensing signal via the parasitic path formed of parasitic capacitance according to the structure of the microactuator and vibration characteristics thereof, which cause noise, signals having opposite polarities are applied to activating vibration plates (21a,21b) using an inverter (27) such that the activating vibration signals of each plate, which cause noise, are offset, thereby improving the signal-to-noise ratio.
公开/授权文献
信息查询