发明公开
EP0845603A1 Microdevice valve structures for fluid control
失效
Ventilstrukturen einer Mikrovorrichtung zur Druckmittelsteuerung
- 专利标题： Microdevice valve structures for fluid control
- 专利标题（中）： Ventilstrukturen einer Mikrovorrichtung zur Druckmittelsteuerung
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申请号： EP97309534.2申请日： 1997-11-26
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公开(公告)号： EP0845603A1公开(公告)日： 1998-06-03
- 发明人: Biegelsen, David K. , Jackson, Warren B. , Cheung, Patrick C.P. , Yim, Mark H. , Berlin, Andrew A.
- 申请人： XEROX CORPORATION
- 申请人地址： Xerox Square Rochester, New York 14644 US
- 专利权人： XEROX CORPORATION
- 当前专利权人： XEROX CORPORATION
- 当前专利权人地址： Xerox Square Rochester, New York 14644 US
- 代理机构： Pike, Christopher Gerard
- 优先权： US757219 19961127
- 主分类号： F15C5/00
- IPC分类号： F15C5/00 ; B32B27/04
摘要：
A valve array system including microelectromechanical valves (27,37,43) embedded in a dielectric substrate (51-56) is disclosed. These microelectromechanical valves (27,37,43) can be batch fabricated using resin impregnated dielectric laminates having photolithographically formed circuitry for electrical connections. Movable components of valves, including electromagnetic or electrostatically actuated membranes, flaps, or beams, can be formed from laminate material using sacrifice layers and etching.
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