发明公开
- 专利标题: Scanning near-field optic/atomic force microscope
- 专利标题(中): 光近场原子力显微镜扫描
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申请号: EP98101571.2申请日: 1994-10-28
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公开(公告)号: EP0846932A3公开(公告)日: 2000-12-20
- 发明人: Chiba, Norio , Muramatsu, Hiroshi
- 申请人: SEIKO INSTRUMENTS INC.
- 申请人地址: 8 Nakase 1-chome, Mihama-ku Chiba-shi, Chiba 261 JP
- 专利权人: SEIKO INSTRUMENTS INC.
- 当前专利权人: SEIKO INSTRUMENTS INC.
- 当前专利权人地址: 8 Nakase 1-chome, Mihama-ku Chiba-shi, Chiba 261 JP
- 代理机构: Fleuchaus, Leo, Dipl.-Ing.
- 优先权: JP27670893 19931105
- 主分类号: G01B7/34
- IPC分类号: G01B7/34 ; G02B21/00
摘要:
The present invention relates to a scanning near-field optic/atomic force microscope adapted to observe topography and optical characteristics of a sample (13), said microscope comprising: a cantilever (2) having a probe (1) in an end portion thereof consisting primarily of a lightpropagating medium having an optical opening for passing light, said optical opening forming a sharp front end; a light-transmitting device (6) having a light-transmitting optical opening in both ends thereof, wherein one of said ends of said light-transmitting device is disposed close to a back surface of said probe (1); a light source (10) and optics (11, 12) for generating a light to measure a feature of the sample (13) and for directing generated light to the sample (13); a photoelectric converter device (7) and optics for receiving light from the sample (13); a deflection-detecting means for optically detecting deflection of said cantilever (2), comprising a light source (3) for generating a laser light for use of deflection-detection; a condenser lens (4) for directing the laser light to a back surface of said cantilever (2); and another photoelectric converter device (5) and optics for detecting reflected light from back surface of said cantilever (2); a motion mechanism (21, 22) for making a relative movement between the sample and said probe; and a gap control means (23) for controlling a distance between the surface of the sample (13) and the sharp front end of said probe (1); wherein the the probe (1) of the cantilever (2) comprises an overhang portion (43) and the condenser lens (4) directs the laser light to said overhang portion (43).
公开/授权文献
- EP0846932B1 Scanning near-field optic/atomic force microscope 公开/授权日:2009-02-18
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