发明授权
- 专利标题: OPTISCHE LINSEN-/DETEKTORANORDNUNG
- 专利标题(英): Optical lens/detector arrangement
- 专利标题(中): 光学透镜/检测器装置
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申请号: EP96919530.4申请日: 1996-05-10
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公开(公告)号: EP0870333B1公开(公告)日: 2002-12-04
- 发明人: MARSO, Michel , SCHELTEN, Jakob , VAN DER HART, André
- 申请人: Forschungszentrum Jülich GmbH
- 申请人地址: 52425 Jülich DE
- 专利权人: Forschungszentrum Jülich GmbH
- 当前专利权人: Forschungszentrum Jülich GmbH
- 当前专利权人地址: 52425 Jülich DE
- 优先权: DE19518303 19950518
- 国际公布: WO96036989 19961121
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232 ; H01L31/052
摘要:
An optical lens/detector arrangement has a monolithic detector layer on the radiation inlet side of a substrate and a monolithic radiation deflection device on the opposite side. The radiation entering the substrate through the radiation inlet side is reflected on the radiation deflection device in such a way that the reflected radiation impinges on the detector layer and is detected there. The radiation deflection device can also have a light deflecting and/or diffracting effect as well as its reflective action so that the impinging radiation is collected and focussed on a certain region of the detector layer.
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