发明公开
- 专利标题: POSITIONING DEVICE HAVING TWO OBJECT HOLDERS
- 专利标题(中): 与两个Object持有人定位平版印刷装置对
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申请号: EP98903239.0申请日: 1998-02-27
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公开(公告)号: EP0900412A1公开(公告)日: 1999-03-10
- 发明人: LOOPSTRA, Erik, Roelof , BONNEMA, Gerrit, Maarten , VAN DER SCHOOT, Harmen, Klaas , VELDHUIS, Gerjan, Peter , KWAN, Yim, Bun, Patrick
- 申请人: Koninklijke Philips Electronics N.V. , ASM LITHOGRAPHY B.V.
- 申请人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 专利权人: Koninklijke Philips Electronics N.V.,ASM LITHOGRAPHY B.V.
- 当前专利权人: Koninklijke Philips Electronics N.V.,ASM LITHOGRAPHY B.V.
- 当前专利权人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 代理机构: Wolfs, Marc Johannes Maria
- 优先权: EP19970200706 19970310
- 国际公布: WO1998040791 19980917
- 主分类号: H01L21
- IPC分类号: H01L21 ; B23Q1 ; B23Q11 ; G01B21 ; G03F7 ; G12B5
摘要:
A positioning device (3) suitable for use in a lithographic device with an exposure position and a characterization position has a displacement system (35) comprising a first displacement unit (39) and a second displacement unit (41) to which object holders (21, 23) can be coupled alternately. The first displacement unit is suitable for carrying out a first series of positioning steps of a first object holder (21) in a first position and for displacing the first object holder from the first position into an intermediate position (M', M'') between the first position and a second position. The second displacement unit is suitable for carrying out a second series of positioning steps of a second object holder (23) in the second position simultaneously with an independently from the first displacement unit and for displacing the second object holder from the second position into the intermediate position. In the intermediate position, the object holders are exchanged, after which the first series of positioning steps can be carried out by the first displacement unit with the second object holder in the first position and the second series of positioning steps can be carried out by the second displacement unit with the first object holder in the second position.
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