发明授权
- 专利标题: LOCAL ENERGY ACTIVATION OF GETTER
- 专利标题(中): 干将当地能源资产TION
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申请号: EP97949479.6申请日: 1997-11-26
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公开(公告)号: EP0958589B1公开(公告)日: 2009-05-13
- 发明人: MASLENNIKOV, Igor, L. , CURTIN, Christopher, J. , CHO, Steven, T. , CONTE, Alfred, S. , POTHOVEN, Floyd, R. , COOPER, Anthony, J.
- 申请人: Canon Kabushiki Kaisha
- 申请人地址: 30-2, Shimomaruko 3-chome Ohta-ku, Tokyo 146-8501 JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: 30-2, Shimomaruko 3-chome Ohta-ku, Tokyo 146-8501 JP
- 代理机构: Ebner von Eschenbach, Jennifer
- 优先权: US766668 19961212; US766435 19961212
- 国际公布: WO1998026443 19980618
- 主分类号: H01J29/46
- IPC分类号: H01J29/46
摘要:
A getter (50 or 74) situated in a cavity of a hollow structure, such as a flat-panel device, is activated by directing light energy locally through part of the hollow structure and onto the getter. The light energy is typically provided by a laser beam (60). The getter, typically of the non-evaporable type, is usually inserted as a single piece of gettering material into the cavity. The getter normally can be activated/re-activated multiple times in this manner, typically during the sealing of different parts of the structure together. The getter-containing cavity can be formed by a pair of plate structures (40 and 42) sandwiched around and outer wall (44), or by an auxiliary compartment (72) connected to a larger main compartment (70) typically constituted by the plate structures and outer wall.
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