发明公开
EP0968753A4 METHOD AND DEVICE FOR TREATING EXHAUST GAS
审中-公开
VERFAHREN UND VORRICHTUNG ZUR BEHANDLUNG VON ABGAS
- 专利标题： METHOD AND DEVICE FOR TREATING EXHAUST GAS
- 专利标题（中）： VERFAHREN UND VORRICHTUNG ZUR BEHANDLUNG VON ABGAS
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申请号： EP98959174申请日： 1998-12-11
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公开(公告)号： EP0968753A4公开(公告)日： 2002-10-29
- 发明人: OHMI TADAHIRO , ISHIHARA YOSHIO , MATSUMOTO KOH , KIMIJIMA TETSUYA
- 申请人： NIPPON OXYGEN CO LTD , OHMI TADAHIRO
- 专利权人： NIPPON OXYGEN CO LTD,OHMI TADAHIRO
- 当前专利权人： NIPPON OXYGEN CO LTD,OHMI TADAHIRO
- 优先权： JP34504797 1997-12-15
- 主分类号： B01D53/86
- IPC分类号： B01D53/86
摘要：
A method for treating an exhaust gas, which comprises bringing an exhaust gas discharged from CVD equipment employing silicon-base gas into contact with a transition metal such as nickel or a silicide thereof preheated to a given temperature, thus decomposing a feed gas and high-boiling intermediates contained in the exhaust gas, and then rendering toxic components contained in the exhaust gas harmless.
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