发明公开
EP0969057A1 Dual-valent rare earth additives to polishing slurries
失效
Polbelchlämme的Doppelwertige Seltenerdadditive
- 专利标题： Dual-valent rare earth additives to polishing slurries
- 专利标题（中）： Polbelchlämme的Doppelwertige Seltenerdadditive
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申请号： EP98305307.5申请日： 1998-07-03
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公开(公告)号： EP0969057A1公开(公告)日： 2000-01-05
- 发明人: Ronay, Maria
- 申请人： International Business Machines Corporation
- 申请人地址： Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构： Boyce, Conor
- 主分类号： C09G1/02
- IPC分类号： C09G1/02 ; H01L21/321 ; C09K3/14 ; C23F3/00
摘要：
A slurry containing abrasive particles and a dual-valent rare earth ion or suspension of its colloidal hydroxide is especially useful for polishing surfaces, including those used in microelectronics. A suspension of a colloidal dual-valent rare earth hydroxide is especially useful for polishing silica.
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