发明公开
EP0983791A4 METHOD AND APPARATUS FOR RECOVERING RARE GAS
有权
VERFAHREN UND VORRICHTUNG ZURRÜCKGEWINNUNGVON EDELGAS
- 专利标题: METHOD AND APPARATUS FOR RECOVERING RARE GAS
- 专利标题(中): VERFAHREN UND VORRICHTUNG ZURRÜCKGEWINNUNGVON EDELGAS
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申请号: EP98955950申请日: 1998-11-27
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公开(公告)号: EP0983791A4公开(公告)日: 2000-05-03
- 发明人: OHMI TADAHIRO , ISHIHARA YOSHIO
- 申请人: NIPPON OXYGEN CO LTD , OHMI TADAHIRO
- 专利权人: NIPPON OXYGEN CO LTD,OHMI TADAHIRO
- 当前专利权人: NIPPON OXYGEN CO LTD,OHMI TADAHIRO
- 优先权: JP33022897 1997-12-01
- 主分类号: B01D53/46
- IPC分类号: B01D53/46 ; B01D53/00 ; B01J3/00 ; C01B23/00 ; C23C16/44 ; B01J3/02 ; C23C16/50 ; C23F4/00 ; H01L21/203 ; H01L21/205
摘要:
A process and an apparatus for recovering a noble gas, which can recover a noble gas exhausted from a noble gas employing system efficiently and also can supply the noble gas of a predetermined purity to the noble gas employing system and which can reduce consumption of the noble gas. In the process and apparatus for recovering a noble gas, when a noble gas contained in an exhaust gas exhausted from a noble gas employing system operated under reduced pressure is recovered, switching between introduction of the exhaust gas to a recovery system and exhaustion of the exhaust gas to an exhaust system is carried out under reduced pressure, and this switching operation is carried out depending on the content of impurity components contained in the exhaust gas or on the running state of the noble gas employing system.
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