发明授权
- 专利标题: METHOD AND APPARATUS FOR RECOVERING A NOBLE GAS
- 专利标题(中): 方法和设备中回收稀有气体
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申请号: EP98955950.5申请日: 1998-11-27
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公开(公告)号: EP0983791B1公开(公告)日: 2004-07-28
- 发明人: OHMI, Tadahiro , ISHIHARA, Yoshio, Nippon Sanso Corp.
- 申请人: Nippon Sanso Corporation , Ohmi, Tadahiro
- 申请人地址: 16-7, Nishi-shinbashi 1-chome, Minato-ku Tokyo 105-0003 JP
- 专利权人: Nippon Sanso Corporation,Ohmi, Tadahiro
- 当前专利权人: Nippon Sanso Corporation,Ohmi, Tadahiro
- 当前专利权人地址: 16-7, Nishi-shinbashi 1-chome, Minato-ku Tokyo 105-0003 JP
- 代理机构: ter Meer, Nicolaus, Dipl.-Chem., Dr.
- 优先权: JP33022897 19971201
- 国际公布: WO1999028023 19990610
- 主分类号: B01J3/02
- IPC分类号: B01J3/02 ; C01B23/00 ; H01L21/205 ; H01L21/203 ; C23C16/50 ; C23F4/00 ; C23C16/44
摘要:
A process and an apparatus for recovering a noble gas, which can recover a noble gas exhausted from a noble gas employing system efficiently and also can supply the noble gas of a predetermined purity to the noble gas employing system and which can reduce consumption of the noble gas. In the process and apparatus for recovering a noble gas, when a noble gas contained in an exhaust gas exhausted from a noble gas employing system operated under reduced pressure is recovered, switching between introduction of the exhaust gas to a recovery system and exhaustion of the exhaust gas to an exhaust system is carried out under reduced pressure, and this switching operation is carried out depending on the content of impurity components contained in the exhaust gas or on the running state of the noble gas employing system.
公开/授权文献
- EP0983791A1 METHOD AND APPARATUS FOR RECOVERING RARE GAS 公开/授权日:2000-03-08
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