发明公开
EP0986462A1 MULTILAYER ABSORBING ANTIREFLECTIVE COATING 审中-公开
MULTI-LAYER和吸收的抗反射涂层

MULTILAYER ABSORBING ANTIREFLECTIVE COATING
摘要:
A reflection control member includes a multilayer stack that is adhered to a substrate using a primer layer to promote adhesion. The multilayer stack includes pairs of layers in which the first layer is a grey metal and the second layer is a substantially transparent material. In the preferred embodiment, the grey metal is nickel chromium and the transparent layer is a silicon oxide. For each pair of layers, the grey metal is nearer to the surface of the substrate for which antireflection is a concern. The primer layer has a thickness of less than 50 angstroms. Although the primer layer is deposited in an essentially oxygen-free environment, it may oxidize following deposition.
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