发明授权
EP1015136B1 METHOD AND APPARATUS FOR SPIN-COATING CHEMICALS 失效
方法和设备ZENTRIFUGALBESCHICHTEN化学品

METHOD AND APPARATUS FOR SPIN-COATING CHEMICALS
摘要:
An apparatus (100) and a method for spin-coating chemicals over a surface of a substrate (130) is disclosed. The apparatus includes a bowl (102) for supporting a substrate (130), a plurality of drain holes defined below the level of the substrate (130), a lid (101) having a flat surface that mates with the bowl (102), and a plurality of injection holes (121) defined in the bowl (102) for applying a solvent to an underside of the substrate, are included. The plurality of injection holes (121) are defined in along an injection ring (227) that is configured to receive the liquid solvent that is to be applied near an outer radius of the underside of the substrate, and the injection ring (227) is spaced apart from the underside of the substrate (130).
公开/授权文献
信息查询
0/0