发明授权
- 专利标题: METHOD AND APPARATUS FOR SPIN-COATING CHEMICALS
- 专利标题(中): 方法和设备ZENTRIFUGALBESCHICHTEN化学品
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申请号: EP98926126.8申请日: 1998-05-29
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公开(公告)号: EP1015136B1公开(公告)日: 2005-09-07
- 发明人: MAHNEKE, Peter , BATCHELDER, William, T.
- 申请人: SUSS MicroTec Lithography GmbH
- 申请人地址: Schleissheimer Strasse 90 85748 Garching DE
- 专利权人: SUSS MicroTec Lithography GmbH
- 当前专利权人: SUSS MicroTec Lithography GmbH
- 当前专利权人地址: Schleissheimer Strasse 90 85748 Garching DE
- 代理机构: Vossius & Partner
- 优先权: US866832 19970530; US866834 19970530
- 国际公布: WO1998053923 19981203
- 主分类号: B05D3/12
- IPC分类号: B05D3/12 ; B05D3/02 ; B05C13/00 ; B05C13/02 ; H01L21/469 ; B05C11/08 ; B05D1/00 ; G03F7/16 ; H01L21/312
摘要:
An apparatus (100) and a method for spin-coating chemicals over a surface of a substrate (130) is disclosed. The apparatus includes a bowl (102) for supporting a substrate (130), a plurality of drain holes defined below the level of the substrate (130), a lid (101) having a flat surface that mates with the bowl (102), and a plurality of injection holes (121) defined in the bowl (102) for applying a solvent to an underside of the substrate, are included. The plurality of injection holes (121) are defined in along an injection ring (227) that is configured to receive the liquid solvent that is to be applied near an outer radius of the underside of the substrate, and the injection ring (227) is spaced apart from the underside of the substrate (130).
公开/授权文献
- EP1015136A1 METHOD AND APPARATUS FOR SPIN-COATING CHEMICALS 公开/授权日:2000-07-05
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