发明公开
- 专利标题: MICROSYSTEME A ELEMENT DEFORMABLE SOUS L'EFFET D'UN ACTIONNEUR THERMIQUE
- 专利标题(英): Microsystem with element deformable by the action of a heat-actuated device
- 专利标题(中): 可变形元暴露热工自动化的微观结构
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申请号: EP98959979.0申请日: 1998-12-14
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公开(公告)号: EP1040492A1公开(公告)日: 2000-10-04
- 发明人: FOUILLET, Yves
- 申请人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 申请人地址: 31-33, rue de la Fédération 75015 Paris FR
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人地址: 31-33, rue de la Fédération 75015 Paris FR
- 代理机构: Weber, Etienne Nicolas
- 优先权: FR9715931 19971216
- 国际公布: WO9931689 19990624
- 主分类号: H01H1/00
- IPC分类号: H01H1/00
摘要:
The invention concerns a microsystem, in particular for producing microswitches or microvalves, constituted on a substrate (50) and used for producing a shift between a first operating state and a second operating state by means of a heat actuated device with bi-metal switch effect. The heat-actuated device comprises a deformable element (51) connected, by opposite ends, to the substrate (50) so as to present naturally a deflection without stress relative to the substrate surface which faces it, said natural deflection determining the first operating state, the second operating state being produced by the heat-actuated device which induces, by the effect of temperature variation, a deformation of the deformable element (51) tending to reduce its deflection and submitting it to a compressive stress by buckling effect in a direction opposite to its natural deflection.
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