发明公开
EP1040492A1 MICROSYSTEME A ELEMENT DEFORMABLE SOUS L'EFFET D'UN ACTIONNEUR THERMIQUE 有权
可变形元暴露热工自动化的微观结构

  • 专利标题: MICROSYSTEME A ELEMENT DEFORMABLE SOUS L'EFFET D'UN ACTIONNEUR THERMIQUE
  • 专利标题(英): Microsystem with element deformable by the action of a heat-actuated device
  • 专利标题(中): 可变形元暴露热工自动化的微观结构
  • 申请号: EP98959979.0
    申请日: 1998-12-14
  • 公开(公告)号: EP1040492A1
    公开(公告)日: 2000-10-04
  • 发明人: FOUILLET, Yves
  • 申请人: COMMISSARIAT A L'ENERGIE ATOMIQUE
  • 申请人地址: 31-33, rue de la Fédération 75015 Paris FR
  • 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
  • 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
  • 当前专利权人地址: 31-33, rue de la Fédération 75015 Paris FR
  • 代理机构: Weber, Etienne Nicolas
  • 优先权: FR9715931 19971216
  • 国际公布: WO9931689 19990624
  • 主分类号: H01H1/00
  • IPC分类号: H01H1/00
MICROSYSTEME A ELEMENT DEFORMABLE SOUS L'EFFET D'UN ACTIONNEUR THERMIQUE
摘要:
The invention concerns a microsystem, in particular for producing microswitches or microvalves, constituted on a substrate (50) and used for producing a shift between a first operating state and a second operating state by means of a heat actuated device with bi-metal switch effect. The heat-actuated device comprises a deformable element (51) connected, by opposite ends, to the substrate (50) so as to present naturally a deflection without stress relative to the substrate surface which faces it, said natural deflection determining the first operating state, the second operating state being produced by the heat-actuated device which induces, by the effect of temperature variation, a deformation of the deformable element (51) tending to reduce its deflection and submitting it to a compressive stress by buckling effect in a direction opposite to its natural deflection.
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