发明公开
EP1048087A1 VERFAHREN ZUR HERSTELLUNG PIEZOELEKTRISCHER AKTOREN 有权
用于生产压电驱动器

  • 专利标题: VERFAHREN ZUR HERSTELLUNG PIEZOELEKTRISCHER AKTOREN
  • 专利标题(英): Method for producing piezoelectric actuators
  • 专利标题(中): 用于生产压电驱动器
  • 申请号: EP99950459.0
    申请日: 1999-07-29
  • 公开(公告)号: EP1048087A1
    公开(公告)日: 2000-11-02
  • 发明人: STIER, HubertHOHL, GuentherBOECKING, Friedrich
  • 申请人: ROBERT BOSCH GMBH
  • 申请人地址: Postfach 30 02 20 70442 Stuttgart DE
  • 专利权人: ROBERT BOSCH GMBH
  • 当前专利权人: ROBERT BOSCH GMBH
  • 当前专利权人地址: Postfach 30 02 20 70442 Stuttgart DE
  • 优先权: DE19850610 19981103
  • 国际公布: WO0026972 20000511
  • 主分类号: H01L41/24
  • IPC分类号: H01L41/24 H01L41/083
VERFAHREN ZUR HERSTELLUNG PIEZOELEKTRISCHER AKTOREN
摘要:
The present invention relates to a method for producing a plurality of piezoelectric actuators (1), wherein said method comprises the steps of: producing films (10) made of a piezoelectric ceramic material; covering one surface at least of the films (10) with electrodes (3); piling up and compressing the films (10) into a stack; sintering the stacked films (10); and separating the stack into individual actuators (1). When the films are stacked, the cavities (11) of said films (10) are accurately aligned on each other.
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