发明公开
- 专利标题: VERFAHREN ZUR HERSTELLUNG PIEZOELEKTRISCHER AKTOREN
- 专利标题(英): Method for producing piezoelectric actuators
- 专利标题(中): 用于生产压电驱动器
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申请号: EP99950459.0申请日: 1999-07-29
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公开(公告)号: EP1048087A1公开(公告)日: 2000-11-02
- 发明人: STIER, Hubert , HOHL, Guenther , BOECKING, Friedrich
- 申请人: ROBERT BOSCH GMBH
- 申请人地址: Postfach 30 02 20 70442 Stuttgart DE
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: Postfach 30 02 20 70442 Stuttgart DE
- 优先权: DE19850610 19981103
- 国际公布: WO0026972 20000511
- 主分类号: H01L41/24
- IPC分类号: H01L41/24 ; H01L41/083
摘要:
The present invention relates to a method for producing a plurality of piezoelectric actuators (1), wherein said method comprises the steps of: producing films (10) made of a piezoelectric ceramic material; covering one surface at least of the films (10) with electrodes (3); piling up and compressing the films (10) into a stack; sintering the stacked films (10); and separating the stack into individual actuators (1). When the films are stacked, the cavities (11) of said films (10) are accurately aligned on each other.
公开/授权文献
- EP1048087B1 VERFAHREN ZUR HERSTELLUNG PIEZOELEKTRISCHER AKTOREN 公开/授权日:2004-10-06
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