发明公开
- 专利标题: Evacuating apparatus
- 专利标题(中): 装置用于抽空的真空系统
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申请号: EP00124826.9申请日: 2000-11-14
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公开(公告)号: EP1101942A2公开(公告)日: 2001-05-23
- 发明人: Ando, Kiyoshi, Tsu Plant of Teijin Seiki Co., Ltd.
- 申请人: Teijin Seiki Co., Ltd.
- 申请人地址: 3-1, Nishishinbashi 3-chome, Minato-ku Tokyo 105-8628 JP
- 专利权人: Teijin Seiki Co., Ltd.
- 当前专利权人: Teijin Seiki Co., Ltd.
- 当前专利权人地址: 3-1, Nishishinbashi 3-chome, Minato-ku Tokyo 105-8628 JP
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权: JP32627699 19991117; JP2000213110 20000713
- 主分类号: F04C23/00
- IPC分类号: F04C23/00 ; F04C18/16
摘要:
An evacuating apparatus having a high energy efficiency when the suction side pressure has reached the ultimate pressure or become a certain degree of vacuum, by decreasing the motive power owing to differential pressure. The evacuating apparatus (100) having a roughing vacuum pump (B) and a booster pump (A), each of which is constituted by a screw vacuum pump, wherein the design pumping speed of the roughing vacuum pump (B) is sufficiently smaller than the design pumping speed of the booster pump (A), but adequate to be operable as the roughing vacuum pump, and the number of turns of screw for the booster pump (A) is less than the number of turns of screw for the roughing vacuum pump (B).
公开/授权文献
- EP1101942B1 Evacuating apparatus 公开/授权日:2007-03-21
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