发明公开
EP1113272A3 Acceleration sensor, acceleration sensor device, and method of fabricating an acceleration sensor
审中-公开
Beschleunigungssensor,Vorrichtung mit Beschleunigungssensor sowie dessen Herstellungsverfahren
- 专利标题: Acceleration sensor, acceleration sensor device, and method of fabricating an acceleration sensor
- 专利标题(中): Beschleunigungssensor,Vorrichtung mit Beschleunigungssensor sowie dessen Herstellungsverfahren
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申请号: EP00403340.3申请日: 2000-11-29
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公开(公告)号: EP1113272A3公开(公告)日: 2003-10-15
- 发明人: Ishikawa, Hiroshi, Fujitsu Limited , Ikata, Osamu, Fujitsu Limited , Satoh, Yoshio, Fujitsu Limited , Tanaka, Hiroshi
- 申请人: FUJITSU LIMITED , Fujitsu Media Devices Limited
- 申请人地址: 1-1, Kamikodanaka 4-chome, Nakahara-ku Kawasaki-shi, Kanagawa 211-8588 JP
- 专利权人: FUJITSU LIMITED,Fujitsu Media Devices Limited
- 当前专利权人: FUJITSU LIMITED,Fujitsu Media Devices Limited
- 当前专利权人地址: 1-1, Kamikodanaka 4-chome, Nakahara-ku Kawasaki-shi, Kanagawa 211-8588 JP
- 代理机构: Thévenet, Jean-Bruno
- 优先权: JP37581399 19991228; JP2000105426 20000406; JP2000131714 20000428
- 主分类号: G01P15/10
- IPC分类号: G01P15/10
摘要:
Providing a small-sized acceleration sensor (10) including a vibrator (1) formed of a piezoelectric single crystal, and a weight section (2) connected to the vibrator (1) and supported at a position different from the position of the center of gravity of an assembly of the vibrator and weight section. Two divided electrodes (1a) used for detecting an electrical signal are formed on the vibrator (1) and connected to two wiring patterns (2a) of the weight section which also functions as a signal detecting substrate, with an anisotropic conductive adhesive. When an acceleration in one direction is applied, an angular moment exerted in the weight section (2) is detected as sliding vibration by the vibrator (1) and an electrical signal corresponding to the acceleration is output from the electrodes (1a) through the wiring patterns (2a).
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