发明公开
EP1122780A3 Laminated radiation member, power semiconductor apparatus and method for producing the same
审中-公开
Laminatkühler,Leistungshalbleiter和seine Herstellung
- 专利标题: Laminated radiation member, power semiconductor apparatus and method for producing the same
- 专利标题(中): Laminatkühler,Leistungshalbleiter和seine Herstellung
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申请号: EP01300797.6申请日: 2001-01-30
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公开(公告)号: EP1122780A3公开(公告)日: 2004-01-02
- 发明人: Araki, Kiyoshi , Kida, Masahiro , Ishikawa, Takahiro , Bessyo, Yuki , Makino, Takuma
- 申请人: NGK INSULATORS, LTD.
- 申请人地址: 2-56 Suda-cho, Mizuho-ku Nagoya-City, Aichi Prefecture 467-8530 JP
- 专利权人: NGK INSULATORS, LTD.
- 当前专利权人: NGK INSULATORS, LTD.
- 当前专利权人地址: 2-56 Suda-cho, Mizuho-ku Nagoya-City, Aichi Prefecture 467-8530 JP
- 代理机构: Paget, Hugh Charles Edward
- 优先权: JP2000023422 20000131
- 主分类号: H01L23/373
- IPC分类号: H01L23/373
摘要:
The object is to provide a laminated radiation member and a power semiconductor apparatus in which no cracks occur due to thermal stress caused by cooling and thermal cycle and which are low in thermal resistance. This is attained by a laminated radiation member comprising a radiation plate, an insulation substrate bonded to the upper surface of the radiation plate and an electrode provided on the upper surface of the insulation substrate, which can be made by a method including a step of, if necessary, previously surface treating a bonding surface of the radiation plate and/or the insulation substrate to assure wettability with a hard solder or a metal, a step of interposing ceramic particles previously surface treated to assure wettability with a hard solder or a metal between the radiation plate and the insulation substrate, a step of disposing a hard solder above and/or below the ceramic particles, a step of heating the hard solder to a temperature higher than the melting point of the solder to melt the solder, a step of penetrating the molten hard solder into spaces between the ceramic particles to react the ceramic particles with the solder to produce a metal base composite material, and a step of bonding the radiation plate and the insulation substrate with the metal base composite material.
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