发明公开
- 专利标题： ELECTRON BEAM DEVICE, METHOD FOR PRODUCING CHARGING-SUPPRESSING MEMBER USED IN THE ELECTRON BEAM DEVICE, AND IMAGE FORMING DEVICE
- 专利标题（中）： 电子器件有限公司，生产用于在充电抑制的方法研究该装置及摄像装置
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申请号： EP99943214.9申请日： 1999-09-08
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公开(公告)号： EP1137041A1公开(公告)日： 2001-09-26
- 发明人: KOSAKA, Yoko , FUSHIMI, Masahiro , MITSUTAKE, Hideaki
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： 30-2, Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： 30-2, Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 代理机构： Beresford, Keith Denis Lewis
- 优先权： JP25434398 19980908; JP28576398 19981007
- 国际公布： WO0014764 20000316
- 主分类号： H01J31/12
- IPC分类号： H01J31/12 ; H01J29/87 ; H01J9/24
摘要：
There are provided an electron beam device which has an atmospheric pressure-resistant member such as a spacer interposed between an electron source and a member to be irradiated with electrons, and can suppress charge on the member, a charging-suppressing member, and its producing method. An electron beam device having an electron source for emitting electrons, a member to be irradiated with the electrons, and a first member interposed between the electron source and the member to be irradiated is characterized in that the surface of the first member has a three-dimensional shape, and projecting portions of the three-dimensional shape form a network shape. In addition, an electron beam device having an electron source for emitting electrons, a member to be irradiated with the electrons, and a first member interposed between the electron source and the member to be irradiated is characterized in that the surface of the first member has a three-dimensional shape, and the three-dimensional shape has recessed portions continuously surrounded by projecting portions.
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