发明授权
EP1186012B1 VERFAHREN ZUR HERSTELLUNG EINES ELEMENTS MIT POROSIDIERTEM MATERIAL
有权
方法用于生产具有POROSIDIERTEM材料的元素
- 专利标题： VERFAHREN ZUR HERSTELLUNG EINES ELEMENTS MIT POROSIDIERTEM MATERIAL
- 专利标题（英）： Method for producing an element with material that has been made porous
- 专利标题（中）： 方法用于生产具有POROSIDIERTEM材料的元素
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申请号： EP00927147.9申请日： 2000-05-05
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公开(公告)号： EP1186012B1公开(公告)日： 2008-04-23
- 发明人: MARSO, Michel , WOLTER, Mike , ARENS-FISCHER, Rüdiger
- 申请人： Forschungszentrum Jülich GmbH
- 申请人地址： 52425 Jülich DE
- 专利权人： Forschungszentrum Jülich GmbH
- 当前专利权人： Forschungszentrum Jülich GmbH
- 当前专利权人地址： 52425 Jülich DE
- 代理机构： Paul, Dieter-Alfred
- 优先权： DE19921190 19990507
- 国际公布： WO2000068983 20001116
- 主分类号： H01L21/306
- IPC分类号： H01L21/306 ; H01L21/3063 ; H01L31/18 ; H01L31/0216 ; G02B5/28
摘要：
The invention relates to a method for producing an element (5), whereby sections of porous material are produced on a support (2, 6) by making them porous. Said sections have a varying porosity curve and /or varying degrees of porosity. The inventive method is characterized by the following steps: a) a first layer (3) of porous material is produced from a substrate (2) which is located on or forms said support by making a large area thereof porous; b) at least one partial area including up to at least that part of the substrate (2) which had not been made porous is selectively removed from the first layer (3); a second layer (4) of porous material is produced from the substrate by making it porous or a) a first layer (9) of porous material is produced from a substrate which is located on or forms a support; b) a porous base layer (10) is produced from a substrate (6) which has been made porous, whereby said base layer has a larger surface than the first layer (9).
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