发明公开
- 专利标题: Plating methods and systems
- 专利标题(中): Methoden und Systeme zur Plattierung
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申请号: EP01308819.0申请日: 2001-10-17
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公开(公告)号: EP1199386A2公开(公告)日: 2002-04-24
- 发明人: Blachier, Olivier Jean , Jansen, Frank , Dickinson, Colin John , Pozniak, Peter Martin
- 申请人: THE BOC GROUP, INC.
- 申请人地址: 575 Mountain Avenue Murray Hill, New Providence, New Jersey 07974-2082 US
- 专利权人: THE BOC GROUP, INC.
- 当前专利权人: THE BOC GROUP, INC.
- 当前专利权人地址: 575 Mountain Avenue Murray Hill, New Providence, New Jersey 07974-2082 US
- 代理机构: Bousfield, Roger James
- 优先权: US241754P 20001020; US254361P 20001211; US742135 20001222
- 主分类号: C25D21/12
- IPC分类号: C25D21/12 ; C25D7/12
摘要:
A method and system are disclosed for plating objects. At least one aspect associated with the object plating is monitored to determine the amount of at least one by-product created during the plating and/or the reduction in the amount of at least one plating component. Based on this monitored aspect, an adjustment is made to the flow rate of substances added to a plating cell and/or the flow rate of used plating substances drained from the plating cell. The used plating substances are purified to remove at least some of the by-product and then the purified plating substances are combined with at least one component before passing back into the plating cell to reuse at least some of the plating substances. The method and system could be used during the plating of semiconductor wafers with copper.
公开/授权文献
- EP1199386A3 Plating methods and systems 公开/授权日:2004-07-28
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