发明公开
- 专利标题: Cerium oxide sol and abrasive
- 专利标题(中): 氧化铈溶胶和磨料
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申请号: EP01130261.9申请日: 2001-12-20
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公开(公告)号: EP1219568A3公开(公告)日: 2003-12-03
- 发明人: Ota, Isao, Nissan Chemical Ind. Ltd. , Tanimoto, Kenji, Nissan Chemical Ind. Ltd. , Nishimura, Tohru, Nissan Chemical Ind. Ltd.
- 申请人: Nissan Chemical Industries, Ltd.
- 申请人地址: 7-1, Kandanishiki-cho 3-chome Chiyoda-ku, Tokyo 101-0054 JP
- 专利权人: Nissan Chemical Industries, Ltd.
- 当前专利权人: Nissan Chemical Industries, Ltd.
- 当前专利权人地址: 7-1, Kandanishiki-cho 3-chome Chiyoda-ku, Tokyo 101-0054 JP
- 代理机构: HOFFMANN - EITLE
- 优先权: JP2000392593 20001225; JP2000392592 20001225; JP2001140015 20010510; JP2001140014 20010510
- 主分类号: C01F17/00
- IPC分类号: C01F17/00 ; C09K3/14
摘要:
There is provided an abrasive used for polishing a substrate which comprises silica as a main component, for example a rock crystal, a quartz glass for photomask, for CMP of an organic film, Inter Layer Dielectric (ILD) and shallow trench isolation of a semiconductor device, or for polishing a hard disk made of glass. A sol which particles are dispersed in a medium, wherein the particles have a particle size of 0.005 to 1 µm and comprise as a main component crystalline cerium oxide of the cubic system and as an additional component a lanthanum compound, a neodymium compound or a combination thereof, wherein the additional component is contained in X/(Ce + X) molar ratio of 0.001 to 0.5 in which X is lanthanum atoms, neodymium atoms or a combination thereof. The sol is prepared by reacting an aqueous solution which a cerium (III) salt is mixed with a lanthanum (III) salt and/or a neodymium (III) salt, with an alkaline substance to give a suspension in which cerium (III) hydroxide is homogeneously mixed with lanthanum (III) hydroxide and/or neodymium (III) hydroxide, and blowing oxygen or a gas containing oxygen into the suspension.
公开/授权文献
- EP1219568B1 Cerium oxide sol and abrasive 公开/授权日:2009-04-08
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