发明公开
- 专利标题: Optical switch using support structures with both fixed mirrors and pivotable mirrors
- 专利标题(中): 具有固定和枢转镜具有支撑结构的光学开关
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申请号: EP01120598.6申请日: 2001-08-29
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公开(公告)号: EP1220008A3公开(公告)日: 2004-06-09
- 发明人: Hoen, Storrs T.
- 申请人: Agilent Technologies, Inc. (a Delaware corporation)
- 申请人地址: 395 Page Mill Road Palo Alto, CA 94303 US
- 专利权人: Agilent Technologies, Inc. (a Delaware corporation)
- 当前专利权人: Agilent Technologies, Inc. (a Delaware corporation)
- 当前专利权人地址: 395 Page Mill Road Palo Alto, CA 94303 US
- 代理机构: Liesegang, Eva
- 优先权: US735352 20001211
- 主分类号: G02B6/35
- IPC分类号: G02B6/35
摘要:
An optical switch (10) uses composite mirrors (40, 42, 44, 46, 48, 50, 52, 54, 56, 58, 60 and 62) having individually addressable pivotable micromirrors (64, 66, 150 and 190) on one side and a fixed mirror arrangement (88, 108 and 110) on another side. Preferably, separate composite mirrors are used in each reflection of an optical beam (38) from an input to an output, with at least one fixed mirror and at least two pivotable mirrors defining the optical path. The function of the first pivotable mirror along the path is to select a target output, while the purpose of the second pivotable mirror is to achieve a low loss coupling to the target output. By combining the fixed mirrors with the micromirror arrays into a single structure, the spacing between adjacent arrays of inputs and the spacing between adjacent arrays of outputs can be reduced. Thus, using the composite mirrors increases the maximum number of optical inputs and outputs for beams having fixed waists.
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