发明公开
EP1227327A2 Acceleration sensor 审中-公开
加速度传感器

Acceleration sensor
摘要:
In an acceleration sensor (10) including a vibrator (1) subject to a sliding vibration and a weight section (2) connected to the vibrator (1) and supported at a position different from the position of the center of gravity of an assembly of the vibrator (1) and weight section (2), for detecting an angular moment about the support point, which is produced at the weight section (2) by application of acceleration, as sliding vibration with the vibrator (1), the acceleration sensor (10) includes a rectangular substrate (3) having a plurality of electrodes (6) electrically connected to the vibrator (1), a formation pattern of the plurality of electrodes (6) is symmetrical about an axis parallel to at least one side of the substrate (3), and the plurality of electrodes (6) have substantially equal thickness. Since the formation pattern of the electrodes (6) on the substrate (3) is symmetrical and the respective electrodes (6) have substantially equal thickness, the vibrator (1) that is bonded to this substrate (3) does not incline and the detection sensitivity does not vary.
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