发明公开
- 专利标题: Acceleration sensor
- 专利标题(中): 加速度传感器
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申请号: EP01402505.0申请日: 2001-09-28
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公开(公告)号: EP1227327A2公开(公告)日: 2002-07-31
- 发明人: Hiroshi, Ishikawa, c/o Fujitsu Limited , Atsushi, Machida, c/o Fujitsu Media Device Limited
- 申请人: FUJITSU LIMITED
- 申请人地址: 1-1, Kamikodanaka 4-chome, Nakahara-ku Kawasaki-shi, Kanagawa 211-8588 JP
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: 1-1, Kamikodanaka 4-chome, Nakahara-ku Kawasaki-shi, Kanagawa 211-8588 JP
- 代理机构: Thévenet, Jean-Bruno
- 优先权: JP2001016400 20010124; JP2001150196 20010518
- 主分类号: G01P15/10
- IPC分类号: G01P15/10
摘要:
In an acceleration sensor (10) including a vibrator (1) subject to a sliding vibration and a weight section (2) connected to the vibrator (1) and supported at a position different from the position of the center of gravity of an assembly of the vibrator (1) and weight section (2), for detecting an angular moment about the support point, which is produced at the weight section (2) by application of acceleration, as sliding vibration with the vibrator (1), the acceleration sensor (10) includes a rectangular substrate (3) having a plurality of electrodes (6) electrically connected to the vibrator (1), a formation pattern of the plurality of electrodes (6) is symmetrical about an axis parallel to at least one side of the substrate (3), and the plurality of electrodes (6) have substantially equal thickness. Since the formation pattern of the electrodes (6) on the substrate (3) is symmetrical and the respective electrodes (6) have substantially equal thickness, the vibrator (1) that is bonded to this substrate (3) does not incline and the detection sensitivity does not vary.
公开/授权文献
- EP1227327A3 Acceleration sensor 公开/授权日:2004-01-21
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