发明公开
- 专利标题： METHOD FOR FORMING ORDERED STRUCTURE OF FINE METAL PARTICLES
- 专利标题（中）： METHOD FOR结构细金属的制造
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申请号： EP00979953.7申请日： 2000-12-07
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公开(公告)号： EP1239521A8公开(公告)日： 2002-11-20
- 发明人: BABA, Masakazu
- 申请人： NEC Corporation , JAPAN SCIENCE AND TECHNOLOGY CORPORATION
- 申请人地址： 7-1, Shiba 5-chome Minato-ku, Tokyo 108-8001 JP
- 专利权人： NEC Corporation,JAPAN SCIENCE AND TECHNOLOGY CORPORATION
- 当前专利权人： NEC Corporation,JAPAN SCIENCE AND TECHNOLOGY CORPORATION
- 当前专利权人地址： 7-1, Shiba 5-chome Minato-ku, Tokyo 108-8001 JP
- 代理机构： Glawe. Delfs. Moll
- 优先权： JP35296599 19991213
- 国际公布： WO01043196 20010614
- 主分类号： H01L29/06
- IPC分类号： H01L29/06 ; H01L29/66 ; C25D13/00 ; C25D13/10
摘要：
In order to preventing thiol-coated metal particles from being liberated from a self-aligning membrane on a substrate during coating the metal particles deposited on the self-aligning membrane with thiol molecules, this invention provides a process for forming a metal particle ordered structure wherein a voltage is applied on the substrate for preventing the metal particles from being liberated from the self-aligning membrane during coating the metal particles deposited on the self-aligning membrane on the substrate with thiol molecules.
公开/授权文献
- EP1239521A1 METHOD FOR FORMING ORDERED STRUCTURE OF FINE METAL PARTICLES 公开/授权日：2002-09-11
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