发明公开
- 专利标题: Partially ionized plasma mass filter
- 专利标题(中): 等离子teilionisiertes等离子体质谱过滤器
-
申请号: EP01204470.7申请日: 2001-11-22
-
公开(公告)号: EP1246226A2公开(公告)日: 2002-10-02
- 发明人: Ohkawa, Tihiro , Miller, Robert L. , Putvinski, Sergei
- 申请人: Archimedes Technology Group, Inc.
- 申请人地址: 5405 Oberlin Dr., 2nd Floor San Diego, CA 92121 US
- 专利权人: Archimedes Technology Group, Inc.
- 当前专利权人: Archimedes Technology Group, Inc.
- 当前专利权人地址: 5405 Oberlin Dr., 2nd Floor San Diego, CA 92121 US
- 代理机构: Gates, Marie Christina Esther
- 优先权: US790357 20010221
- 主分类号: H01J49/30
- IPC分类号: H01J49/30
摘要:
A filter and a method for separating ions in a partially ionized plasma according to their mass includes a chamber with crossed electric and magnetic fields established therein. A feed, including metal atoms having ionization potentials in a low range, and gas atoms having an ionization potential in a high range, is introduced into the chamber. An electron temperature below the low range is generated to partially ionize the feed by dissociating the metal atoms from the gas atoms, and by ionizing the metal atoms into light and heavy ions according to their mass to charge ratio. The light and heavy ions are then influenced by the crossed electric and magnetic fields to separate the light ions from the heavy ions.
公开/授权文献
- EP1246226A3 Partially ionized plasma mass filter 公开/授权日:2003-05-07
信息查询