发明公开
- 专利标题: MAGNETIC ELEMENT WITH INSULATING VEILS AND FABRICATING METHOD THEREOF
- 专利标题(中): 用绝缘袋和相关方法磁性元件
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申请号: EP01928727.5申请日: 2001-04-20
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公开(公告)号: EP1279176A2公开(公告)日: 2003-01-29
- 发明人: CHEN, Eugene, Youjun , DURLAM, Mark , TEHRANI, Saied, N. , DEHERRERA, Mark , KERSZYKOWSKI, Gloria , KYLER, Kelly, Wayne
- 申请人: MOTOROLA, INC.
- 申请人地址: 1303 East Algonquin Road Schaumburg, IL 60196 US
- 专利权人: MOTOROLA, INC.
- 当前专利权人: MOTOROLA, INC.
- 当前专利权人地址: 1303 East Algonquin Road Schaumburg, IL 60196 US
- 代理机构: Treleven, Colin
- 优先权: US560738 20000428
- 国际公布: WO01084570 20011108
- 主分类号: H01F10/32
- IPC分类号: H01F10/32 ; H01F41/30
摘要:
An improved and novel device and fabrication method for a magnetic element, and more particularly a magnetic element (10) including a first electrode (14), a second electrode (18) and a spacer layer (16). The first electrode (14) and the second electrode (18) include ferromagnetic layers (26 & 28). A spacer layer (16) is located between the ferromagnetic layer (26) of the first electrode (14) and the ferromagnetic layer (28) of the second electrode (16) for permitting tunneling current in a direction generally perpendicular to the ferromagnetic layers (26 & 28). The device includes insulative veils (34) characterized as electrically isolating the first electrode (14) and the second electrode (18), the insulative veils (34) including non-magnetic and insulating dielectric properties. Additionally disclosed is a method of fabricating the magnetic element (10) with insulative veils (34) that have been transformed from having conductive properties to insulative properties through oxygen plasma ashing techniques.
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