发明公开
EP1291064A2 Air filter, method of manufacturing air filter, local facility, clean room, treating agent, and method of manufacturing filter medium 失效
空气过滤器,空气过滤器,本地系统中,洁净室设备,治疗和制造过滤介质的方法的制备方法中

Air filter, method of manufacturing air filter, local facility, clean room, treating agent, and method of manufacturing filter medium
摘要:
A material not releasing gaseous organic substances during use is used as a filter medium and a sealing material for tightly sealing between the medium and a frame. Specifically, a synthetic paraffin not containing an aliphatic hydrocarbon having not more than 19 carbon atoms or less is used as a non-silicone type water repellent contained in a treatment agent for forming fibers into a cloth-like filter medium. A carboxylic acid ester having 400 or more molecular weight is used as a plasticizer and a phenolic compound having 300 or more molecular weight is used as an antioxidant to be added to the treatment agent and the sealing material. This enables that the gaseous organic substances are not present in a clean room, a semiconductor production apparatus or the like. Further, if the filter medium and the sealing material are formed of a material not releasing organic phosphorus compounds and boron compounds in the air, a clean room and a local facility particularly suitable for use in the production of semiconductors are provided.
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