发明公开
EP1304499A4 VIBRATION ISOLATING DEVICE USING MAGNETIC LEVITATING DEVICE
审中-公开
SCH UN UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG
- 专利标题: VIBRATION ISOLATING DEVICE USING MAGNETIC LEVITATING DEVICE
- 专利标题(中): SCH UN UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG UNG
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申请号: EP01949958申请日: 2001-07-12
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公开(公告)号: EP1304499A4公开(公告)日: 2005-02-02
- 发明人: WATANABE KATSUHIDE , HAGA TAKAHIDE , KANEMITSU YOICHI
- 申请人: EBARA CORP
- 专利权人: EBARA CORP
- 当前专利权人: EBARA CORP
- 优先权: JP2000212406 2000-07-13
- 主分类号: F16F15/02
- IPC分类号: F16F15/02 ; F16F15/03 ; G03F7/20 ; G05D19/02 ; H01L21/027
摘要:
A vibration isolating device capable of stably supporting a vibration isolating table to surely insulate a vibration-protected device from an external vibration, comprising a the vibration isolating table (10), magnetic levitating devices (31) to (34) supporting the vibration isolating table (10) in the state of non-contact with the table and applying a control force to the table, displacement sensors (41) to (44) detecting the relative displacement amount of the vibration isolating table (10) relative to a foundation and outputting displacement signals, acceleration sensors (61) to (63) outputting acceleration signals when detecting the vibration of the foundation, and a controller (5), the controller further comprising a first control loop for positioning the vibration isolating table (10) relative to the foundation by providing a feedback of the displacement signals to the magnetic levitating devices (31) to (34) and a second control loop for suppressing the transmission of vibration from the foundation to the vibration isolating table (10) by providing a feed-forward of the acceleration signals to the magnetic levitating devices (31) to (34) after compensation.
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