发明公开
- 专利标题: Reticle
- 专利标题(中): Retikel
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申请号: EP02102670.3申请日: 2002-12-02
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公开(公告)号: EP1319985A3公开(公告)日: 2005-03-16
- 发明人: Daniels, Ian , Martin, Brian
- 申请人: Zarlink Semiconductor Limited
- 申请人地址: Cheney Manor Swindon, Wiltshire SN2 2QW GB
- 专利权人: Zarlink Semiconductor Limited
- 当前专利权人: Zarlink Semiconductor Limited
- 当前专利权人地址: Cheney Manor Swindon, Wiltshire SN2 2QW GB
- 代理机构: Asquith, Julian Peter
- 优先权: GB0129775 20011213
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
A reticle for use in a photolithography process for exposing a photoresist layer in the production of a component which is formed from a plurality of adjacent exposed areas, comprises: an exposure aperture adapted to allow light to pass through the reticle; a patterned area within said exposure aperture which defines at least part of the functional design of the component; and one or more "stitching" structures located close to one or more of the edges of the exposure aperture, said "stitching" structures being arranged to create "stitching" marks on the photoresist, which can be used to determine whether said adjacent exposed areas have been accurately positioned.
公开/授权文献
- EP1319985A2 Reticle 公开/授权日:2003-06-18
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