发明公开
- 专利标题： Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
- 专利标题（中）： 稳定性聚合反应抑制环取代四硅氧烷
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申请号： EP02028017.8申请日： 2002-12-13
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公开(公告)号： EP1321469A1公开(公告)日： 2003-06-25
- 发明人: Mayorga, Steven Gerard , Xiao, Manchao , Gaffney, Thomas Richard
- 申请人： AIR PRODUCTS AND CHEMICALS, INC.
- 申请人地址： 7201 Hamilton Boulevard Allentown, PA 18195-1501 US
- 专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人地址： 7201 Hamilton Boulevard Allentown, PA 18195-1501 US
- 代理机构： Schwabe - Sandmair - Marx
- 优先权： US29892 20011221
- 主分类号： C07F7/21
- IPC分类号： C07F7/21
摘要：
The present invention is; (a) a process for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of a neutral to weakly acidic polymerization inhibitor to such cyclotetrasiloxane; and (b) a composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization used in. a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication, comprising; such cyclotetrasiloxane and a neutral to weakly acidic polymerization inhibitor. A free radical scavenger can also be included in the process and composition.
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