发明授权
- 专利标题: LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM
- 专利标题(中): 随着对曝光系统低热膨胀性,部件用陶瓷
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申请号: EP01967756.6申请日: 2001-09-20
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公开(公告)号: EP1323684B1公开(公告)日: 2009-05-27
- 发明人: YOSHITOMI, Yasuki , ARAHORI, Tadahisa
- 申请人: Ferrotec Ceramics Corporation
- 申请人地址: 1-4-14, Kyobashi Chuo-ku Tokyo 104-0031 JP
- 专利权人: Ferrotec Ceramics Corporation
- 当前专利权人: Ferrotec Ceramics Corporation
- 当前专利权人地址: 1-4-14, Kyobashi Chuo-ku Tokyo 104-0031 JP
- 代理机构: Stuart, Ian Alexander
- 优先权: JP2000284873 20000920; JP2001015409 20010124
- 国际公布: WO2002024600 20020328
- 主分类号: C04B35/16
- IPC分类号: C04B35/16 ; H01L21/027 ; G03F7/20 ; C04B35/19 ; C04B35/195 ; C04B35/645
摘要:
A low thermal expansion ceramic which comprises at least one selected from the group consisting of cordierite, spodumene and eucryptite in an amount of 60 vol % to 99.9 vol % and at least one selected from the group consisting of carbides, nitrides and borides of 4a Group elements, 5a Group elements and 6a Group elements and boron carbide in an amount of 0.1 vol % to 40 vol %, and has a porosity of 0.5 % or less and a thermal expansion coefficient at 10 ° to 40 ° of 1.5 X 10-6/°C or less. The above ceramic has high rigidity and good resistance to abrasion together with low thermal expansion.
公开/授权文献
- EP1323684B9 LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM 公开/授权日:2010-03-03
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