发明授权
EP1323684B1 LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM 有权
随着对曝光系统低热膨胀性,部件用陶瓷

LOW THERMAL EXPANSION CERAMIC AND MEMBER FOR EXPOSURE SYSTEM
摘要:
A low thermal expansion ceramic which comprises at least one selected from the group consisting of cordierite, spodumene and eucryptite in an amount of 60 vol % to 99.9 vol % and at least one selected from the group consisting of carbides, nitrides and borides of 4a Group elements, 5a Group elements and 6a Group elements and boron carbide in an amount of 0.1 vol % to 40 vol %, and has a porosity of 0.5 % or less and a thermal expansion coefficient at 10 ° to 40 ° of 1.5 X 10-6/°C or less. The above ceramic has high rigidity and good resistance to abrasion together with low thermal expansion.
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