发明公开
EP1346952A3 Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
有权
一种副产物影响生产Stickstofftriflourid的减少或消除NH 3 / HF方法
- 专利标题： Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
- 专利标题（中）： 一种副产物影响生产Stickstofftriflourid的减少或消除NH 3 / HF方法
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申请号： EP03006215.2申请日： 2003-03-20
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公开(公告)号： EP1346952A3公开(公告)日： 2004-04-07
- 发明人: Tsirukis, Athanasios , Lileck, John Theodore , Withers, Howard Paul, Jr. , Fegley, Kenneth E.
- 申请人： AIR PRODUCTS AND CHEMICALS, INC.
- 申请人地址： 7201 Hamilton Boulevard Allentown, PA 18195-1501 US
- 专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人地址： 7201 Hamilton Boulevard Allentown, PA 18195-1501 US
- 代理机构： Schwabe - Sandmair - Marx
- 优先权： US102488 20020320
- 主分类号： C01B21/083
- IPC分类号： C01B21/083 ; C01B7/19
摘要：
A process for reducing or eliminating NH 3 /HF/MFz liquid waste melt in the manufacture of NF 3 is provided which includes the steps of providing an NF 3 reactor for a reaction of F 2 with a liquid NH 3 /HF/MFz mixture that produces NF 3 , HF, N 2 and other nitrogen fluorides as gaseous products and a liquid NH 3 /HF/MFz mixture as the liquid waste melt. The process further provides for reduction or elimination of the liquid NH 3 /HF/MFz waste melt produced by the reactor.
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