A method for washing a substrate including: degreasing the substrate with a washing liquid; then rinsing the substrate with rinsing liquid; and then drying the substrate, wherein the washing liquid is alkaline ionized water having a temperature of from 20 °C to 90 °C. An apparatus for washing a substrate (4) for an electrophotographic photoreceptor including: a washing container (1) configured to contain alkaline ionized water (9) to wash the substrate (4); a heater (H 1 ) configured to heat the alkaline ionized water (9) to a temperature of from 20 °C to 90 °C; a rinsing container (2) configured to contain rinsing liquid (12) to rinse the washed substrate (4); a warming container (3) configured to contain pure water (13) to warm the rinsed substrate (4); a holder (14) configured to support the substrate; and a lifter (7) configured to up and down the substrate (4) and oscillate the substrate (4).