发明公开
EP1383084A3 Method and apparatus of inspecting surface irregularity of an object article 失效
用于检查物体的表面凹凸的方法和装置

Method and apparatus of inspecting surface irregularity of an object article
摘要:
The present invention provides a method and apparatus of inspecting a surface of an object article capable of precisely detecting stains or miniature defects present in the object surface. Specifically, the invention provides a method of inspecting surface irregularity of an object article having a surface of uniform or regular brightness, which comprises the steps of: gaining brightness informations for a plurality of two-dimensionally distributed pixels by taking a picture of the article surface; finding stains on the article surface in response to each information obtained in the brightness information gaining step to produce a first output; finding miniature defects smaller in size than a unit pixel in response to each information obtained in the brightness information gaining step to generate a second output; switching the first output and the second output into appropriate electrical signals in a controlled manner; and displaying the switched electrical signals on a display in a viewable condition.
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