发明公开
- 专利标题: Method and apparatus of inspecting surface irregularity of an object article
- 专利标题(中): 用于检查物体的表面凹凸的方法和装置
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申请号: EP03023001.5申请日: 1994-10-27
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公开(公告)号: EP1383084A3公开(公告)日: 2004-07-14
- 发明人: Itagaki, Chuji , Itou, Masahiro , Ichiba, Kouzou
- 申请人: TOSHIBA ENGINEERING CORPORATION
- 申请人地址: 66-2, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210 JP
- 专利权人: TOSHIBA ENGINEERING CORPORATION
- 当前专利权人: TOSHIBA ENGINEERING CORPORATION
- 当前专利权人地址: 66-2, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210 JP
- 代理机构: Weitzel, David Stanley
- 优先权: JP26899293 19931027; JP3928394 19940215; JP1680394 19940210
- 主分类号: G06T7/00
- IPC分类号: G06T7/00
摘要:
The present invention provides a method and apparatus of inspecting a surface of an object article capable of precisely detecting stains or miniature defects present in the object surface. Specifically, the invention provides a method of inspecting surface irregularity of an object article having a surface of uniform or regular brightness, which comprises the steps of: gaining brightness informations for a plurality of two-dimensionally distributed pixels by taking a picture of the article surface; finding stains on the article surface in response to each information obtained in the brightness information gaining step to produce a first output; finding miniature defects smaller in size than a unit pixel in response to each information obtained in the brightness information gaining step to generate a second output; switching the first output and the second output into appropriate electrical signals in a controlled manner; and displaying the switched electrical signals on a display in a viewable condition.
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