There is provided a multi-charged beam lens constituted by stacking, via fiber chips (212) serving as insulator members along the optical path of a charged beam, a plurality of electrodes (201a-201c) having a charged beam passing region (202) where a plurality of charged beam apertures are formed. The electrodes have shield apertures (203) between the charged beam passing region and the fiber chips. A conductive shield (204) extends through the shield apertures without contacting the electrodes, and cuts off a straight path which connects the charged beam passing region (202) and the fiber chips (212) serving as insulator members. This prevents the influence of charge-up of the insulator members on an electron beam in the multi-charged beam lens.