- 专利标题: PROCESS FOR PRODUCTION OF FLUORINE-CONTAINING NORBORNENE DERIVATIVES
- 专利标题(中): 用于生产含氟降冰片烯
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申请号: EP02746012.0申请日: 2002-07-12
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公开(公告)号: EP1415974A1公开(公告)日: 2004-05-06
- 发明人: ARAKI, Takayuki, c/o DAIKIN INDUSTRIES, LTD. , ISHIKAWA, Takuji, c/o DAIKIN INDUSTRIES, LTD. , KUME, Takuji, c/o DAIKIN INDUSTRIES, LTD. , YAMAMOTO, Akinori, c/o DAIKIN INDUSTRIES, LTD.
- 申请人: Daikin Industries, Ltd.
- 申请人地址: Umeda Center Building, 4-12, Nakazaki-nishi 2-chome, Kita-ku Osaka-shi, Osaka 530-8323 JP
- 专利权人: Daikin Industries, Ltd.
- 当前专利权人: Daikin Industries, Ltd.
- 当前专利权人地址: Umeda Center Building, 4-12, Nakazaki-nishi 2-chome, Kita-ku Osaka-shi, Osaka 530-8323 JP
- 代理机构: HOFFMANN - EITLE
- 优先权: JP2001212689 20010712; JP2001280548 20010914; JP2002043920 20020220
- 国际公布: WO2003006413 20030123
- 主分类号: C07C45/68
- IPC分类号: C07C45/68 ; C07C49/567 ; C07C33/44 ; C07C29/36 ; C07C43/172 ; C08F32/00 ; G03F7/039
摘要:
There are provided a novel norbornene derivative which is a material for a chemically amplifying type photoresist for F 2 laser, possesses excellent transparency and improved dry etching resistivity and has a fluorine-containing ketone unit or fluorine-containing tertiary alcohol unit directly bonded to the norbornene backbone; a fluorine-containing polymer obtained by using the norbornene derivative as a copolymerizable monomer; and a chemically amplifying type photoresist composition comprising the fluorine-containing polymer, a photoacid generator and a solvent.
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