发明公开
- 专利标题: Process for producing polyimide optical waveguide
- 专利标题(中): 一种用于生产所述聚酰亚胺光波导过程。
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申请号: EP03026883.3申请日: 2003-11-24
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公开(公告)号: EP1424577A2公开(公告)日: 2004-06-02
- 发明人: Mune, Kazunori , Naitou, Ryuusuke , Mochizuki, Amane
- 申请人: NITTO DENKO CORPORATION
- 申请人地址: 1-2, Shimohozumi 1-chome Ibaraki-shi Osaka JP
- 专利权人: NITTO DENKO CORPORATION
- 当前专利权人: NITTO DENKO CORPORATION
- 当前专利权人地址: 1-2, Shimohozumi 1-chome Ibaraki-shi Osaka JP
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权: JP2002346996 20021129
- 主分类号: G02B6/12
- IPC分类号: G02B6/12 ; G02B1/04 ; C08L79/00
摘要:
This invention provides a process for producing a polyimide optical waveguide, which comprises the steps of: (a) forming an undercladding layer on a substrate, (b) forming a photosensitive polyimide resin precursor composition layer on the undercladding layer, (c) irradiating the photosensitive polyimide resin precursor composition layer, excepting a region corresponding to a core pattern, with a UV light through a mask, followed by heating after exposure, (d) removing a UV-unexposed area of the layer by development, (e) heating a UV-exposed area of the layer to imidize the UV-exposed area, thereby forming a cladding layer having a desired pattern, (f) coating the region corresponding to the core pattern and a surface of the cladding layer with a polyamic acid that forms a polyimide resin having a higher refraction index than the polyimide resin of the cladding layer, and imidizing the polyamic acid by heating to form a core layer, and (g) forming an overcladding layer on the core layer, wherein the photosensitive polyimide resin precursor composition comprises: (i) a polyamic acid obtained from a tetracarboxylic dianhydride and a diamine; and (ii) a photosensitive agent comprising a specific 1,4-dihydropyridine derivative.
公开/授权文献
- EP1424577B1 Process for producing polyimide optical waveguide 公开/授权日:2008-04-09
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