发明公开
EP1455394A1 TRANSFER METHOD, METHOD OF MANUFACTURING THIN FILM ELEMENT, METHOD OF MANUFACTURING INTEGRATED CIRCUIT, CIRCUIT SUBSTRATE AND METHOD OF MANUFACTURING THE CIRCUIT SUBSTRATE, ELECTRO-OPTIC DEVICE AND METHOD OF MANUFACTURING THE ELECTRO-OPTIC DEVICE, AND IC CARD AND ELECTRONIC EQUIPMENT
有权
转移过程中,用于生产薄膜元件,方法:生成电路基板,电气和光学仪器IC车的生产电光装置及方法的集成电路,电路基板和方法
- 专利标题: TRANSFER METHOD, METHOD OF MANUFACTURING THIN FILM ELEMENT, METHOD OF MANUFACTURING INTEGRATED CIRCUIT, CIRCUIT SUBSTRATE AND METHOD OF MANUFACTURING THE CIRCUIT SUBSTRATE, ELECTRO-OPTIC DEVICE AND METHOD OF MANUFACTURING THE ELECTRO-OPTIC DEVICE, AND IC CARD AND ELECTRONIC EQUIPMENT
- 专利标题(中): 转移过程中,用于生产薄膜元件,方法:生成电路基板,电气和光学仪器IC车的生产电光装置及方法的集成电路,电路基板和方法
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申请号: EP02749361.8申请日: 2002-07-24
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公开(公告)号: EP1455394A1公开(公告)日: 2004-09-08
- 发明人: SHIMODA, Tatsuya, c/o SEIKO EPSON CORPORATION , UTSUNOMIYA, Sumio, c/o SEIKO EPSON CORPORATION
- 申请人: SEIKO EPSON CORPORATION
- 申请人地址: 4-1, Nishishinjuku 2-chome, Shinjuku-ku Tokyo 160-0811 JP
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: 4-1, Nishishinjuku 2-chome, Shinjuku-ku Tokyo 160-0811 JP
- 代理机构: Kenyon, Sarah Elizabeth
- 优先权: JP2001223433 20010724; JP2001282423 20010917; JP2001282424 20010917
- 国际公布: WO2003010825 20030206
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L27/00 ; H01L21/52 ; G02F1/133 ; G09F9/00
摘要:
A transfer method comprising a step of forming a plurality of transferred bodies on a transfer origin substrate, and a step of applying energy to partial regions corresponding to the transferred bodies to be transferred, and transferring these transferred bodies corresponding to the partial regions onto a transfer destination substrate. A plurality of transferred bodies such as devices or circuits that are to be disposed on a transfer destination substrate with spaces therebetween can be manufactured integrated together on a transfer origin substrate, and hence compared with the case that the transferred bodies are formed on the transfer destination substrate directly, the amount of materials used in the manufacture of the transferred bodies can be reduced, the area efficiency can be greatly improved, and a transfer destination substrate on which a large number of devices or circuits are disposed in scattered locations can be manufactured efficiently and cheaply.
公开/授权文献
- EP1455394B1 TRANSFER METHOD 公开/授权日:2018-04-11
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