发明公开
EP1459416A2 GAIN GUIDE IMPLANT IN OXIDE VERTICAL CAVITY SURFACE EMITTING LASER
审中-公开
GAIN引导种植体OXIDIERTEN-面发射激光器具有垂直谐振器
- 专利标题: GAIN GUIDE IMPLANT IN OXIDE VERTICAL CAVITY SURFACE EMITTING LASER
- 专利标题(中): GAIN引导种植体OXIDIERTEN-面发射激光器具有垂直谐振器
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申请号: EP02787002.1申请日: 2002-12-11
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公开(公告)号: EP1459416A2公开(公告)日: 2004-09-22
- 发明人: BIARD, James, R. , GUENTER, James, K.
- 申请人: FINISAR CORPORATION
- 申请人地址: 1308 Moffett Park Drive Sunnyvale, CA 94089 US
- 专利权人: FINISAR CORPORATION
- 当前专利权人: FINISAR CORPORATION
- 当前专利权人地址: 1308 Moffett Park Drive Sunnyvale, CA 94089 US
- 代理机构: Finnie, Peter John
- 优先权: US28436 20011228
- 国际公布: WO2003058267 20030717
- 主分类号: H01S5/183
- IPC分类号: H01S5/183
摘要:
A vertical cavity surface emitting laser [100] with a current guide comprised of an ion (160) implant region and an oxide structure (140). The oxide structure (140) is beneficially formed first, then, a gain guide ion implant region (160) is formed in or below the oxide structure (140). The ion (160) implant region extends into an active region (22). The energy and dosage used when forming the ion (160) implant gain guide can be selected to control the lateral sheet resistance and the active region's (22) non-radiative recombination centers.
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