Invention Publication
EP1475603A2 Calibration method for a surface texture measuring instrument and said instrument 审中-公开
用于设备校准的方法,用于测量表面纹理,并且所述设备

Calibration method for a surface texture measuring instrument and said instrument
Abstract:
In a calibration method for a surface texture measuring instrument which measures the surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge the cross section of which contains a part of a substantially perfect circle, an assignment step for assigning the detection results from the measurement step in an evaluation formula based on the equation of a circle in which the center coordinates of the calibration gauge are (x c , z c ) and the radius is "r", and a calibration step for calibrating each parameter based on the results obtained in the assignment step.
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