发明授权
- 专利标题: DIODE SCHOTTKY DE PUISSANCE A SUBSTRAT SICOI, ET PROCEDE DE REALISATION D'UNE TELLE DIODE
- 专利标题(英): Schottky power diode comprising a sicoi substrate and the method of producing one such diode
- 专利标题(中): 肖特基SiCOI基材和过程,这影响性能
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申请号: EP03727583.1申请日: 2003-03-12
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公开(公告)号: EP1483793B1公开(公告)日: 2011-08-31
- 发明人: TEMPLIER, François , BILLON, Thierry , DAVAL, Nicolas
- 申请人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives , S.O.I. Tec Silicon on Insulator Technologies
- 申请人地址: Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris FR
- 专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives,S.O.I. Tec Silicon on Insulator Technologies
- 当前专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives,S.O.I. Tec Silicon on Insulator Technologies
- 当前专利权人地址: Bâtiment "Le Ponant D" 25, rue Leblanc 75015 Paris FR
- 代理机构: Poulin, Gérard
- 优先权: FR0203165 20020314
- 国际公布: WO2003077321 20030918
- 主分类号: H01L29/872
- IPC分类号: H01L29/872
摘要:
The invention relates to a power junction device comprising: a SiCOI-type substrate with a silicon carbide layer (16) which is insulated from a solid support (12) by means of an insulating buried layer (14), and at least one Schottky contact between a first metallic layer (40) and the silicon carbide surface layer (16), said first metallic layer (30) forming an anode.
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