发明公开
EP1491655A2 Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
有权
Stabilisatoren，um die Polymerization substitutionierter Cyclotetrasiloxane zu verhindern
- 专利标题： Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
- 专利标题（中）： Stabilisatoren，um die Polymerization substitutionierter Cyclotetrasiloxane zu verhindern
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申请号： EP04014368.7申请日： 2004-06-18
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公开(公告)号： EP1491655A2公开(公告)日： 2004-12-29
- 发明人: Mayorga, Steven Gerard , Xiao, Manchao , Gaffney, Thomas Richard , Syvret, Robert George
- 申请人： AIR PRODUCTS AND CHEMICALS, INC.
- 申请人地址： 7201 Hamilton Boulevard Allentown, PA 18195-1501 US
- 专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人地址： 7201 Hamilton Boulevard Allentown, PA 18195-1501 US
- 代理机构： Teipel, Susanne, Dr.
- 优先权： US602279 20030623
- 主分类号： C23C16/40
- IPC分类号： C23C16/40 ; H01L21/316
摘要：
The present invention is; (a) a process for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of a free radical scavenger polymerization inhibitor to such cyclotetrasiloxane; and (b) a composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization used in a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication, comprising; such cyclotetrasiloxane and a free radical scavenger polymerization inhibitor.
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