发明授权
- 专利标题: WIRING MATERIAL AND WIRING BOARD USING THE SAME
- 专利标题(中): 配线材料配线板
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申请号: EP03752892.4申请日: 2003-04-14
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公开(公告)号: EP1507267B1公开(公告)日: 2008-11-05
- 发明人: INOUE, Kazuyoshi
- 申请人: IDEMITSU KOSAN COMPANY LIMITED
- 申请人地址: 1-1, Marunouchi 3-chome Chiyoda-ku Tokyo 100-0005 JP
- 专利权人: IDEMITSU KOSAN COMPANY LIMITED
- 当前专利权人: IDEMITSU KOSAN COMPANY LIMITED
- 当前专利权人地址: 1-1, Marunouchi 3-chome Chiyoda-ku Tokyo 100-0005 JP
- 代理机构: Gille Hrabal Struck Neidlein Prop Roos
- 优先权: JP2002143312 20020517; JP2002143318 20020517
- 国际公布: WO2003098641 20031127
- 主分类号: H01B1/02
- IPC分类号: H01B1/02 ; H01B5/14 ; C22C5/06 ; C22C9/00 ; H01L29/786 ; H01L21/28 ; G02F1/1343
摘要:
A wiring material for TFT-LCD which comprises an Ag alloy containing Ag and Zr as essential components and further one or more metals selected from the group consisting of Au, Ni, Co and Al; and a wiring material which comprises a Cu alloy comprising Au and/or Co and Cu, wherein the alloy has a Cu content of 80 to 99.5 wt % and the sum of a Au content and a Co content of 0.5 to 20 wt %. A film formed using a wiring material comprising the above alloy comprising Ag (or Cu) on a glass substrate or a silicon wafer by the sputtering method has exhibited satisfactorily low electric resistance and also satisfactorily high adhesion strength to the substrate or the wafer.
公开/授权文献
- EP1507267A1 WIRING MATERIAL AND WIRING BOARD USING THE SAME 公开/授权日:2005-02-16
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