发明公开
EP1517369A2 Method of manufacturing wafer level chip size package 审中-公开
Verfahren zur Herstellung eines“Chip-size-package”auf Waferebene

Method of manufacturing wafer level chip size package
摘要:
To widely improve an entire manufacturing efficiency by efficiently forming a thermal stress relaxing post, an insulating layer and a solder bump, arewiringcircuit (3) is formedonawafer (1) byplating, a thermal stress relaxing post (4) made of a conductive material such as a solder or the like is formed on the rewiring circuit (3), an insulating layer (6) made of a polyimide or the like is formed in the periphery of the rewiring circuit (3) and the thermal stress relaxing post (4) except a top surface of the thermal stress relaxing post (4), a solder bump (7) is formed on the thermal stress relaxing post (4), and the thermal stress relaxing post (4), the insulating layer (6) and the solder bump (7) are formed by screen printing.
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