Invention Grant
EP1522084B1 METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM
有权
DEVICE AND METHOD FOR磁聚焦离轴电子
- Patent Title: METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM
- Patent Title (中): DEVICE AND METHOD FOR磁聚焦离轴电子
-
Application No.: EP03763466.4Application Date: 2003-07-09
-
Publication No.: EP1522084B1Publication Date: 2011-11-16
- Inventor: CATTELINO, Mark J., , FRIEDLANDER, Fred I.,
- Applicant: Communications & Power Industries, Inc.
- Applicant Address: 811 Hansen Way, MS B-450 Palo Alto, CA 94303-1110 US
- Assignee: Communications & Power Industries, Inc.
- Current Assignee: Communications & Power Industries, Inc.
- Current Assignee Address: 811 Hansen Way, MS B-450 Palo Alto, CA 94303-1110 US
- Agency: Falk, Urs
- Priority: US192772 20020709
- International Announcement: WO2004006281 20040115
- Main IPC: H01J23/087
- IPC: H01J23/087
Abstract:
Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device (MBEBD). A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a (MBEBD). The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the (MBEBD). The flux plate includes apertures for each beam of the (MBEBD). A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps (MBEBD) have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the (MBEBD) as linear beams.
Public/Granted literature
- EP1522084A2 METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM Public/Granted day:2005-04-13
Information query