发明授权
EP1522084B1 METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM
有权
DEVICE AND METHOD FOR磁聚焦离轴电子
- 专利标题: METHOD AND APPARATUS FOR MAGNETIC FOCUSING OF OFF-AXIS ELECTRON BEAM
- 专利标题(中): DEVICE AND METHOD FOR磁聚焦离轴电子
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申请号: EP03763466.4申请日: 2003-07-09
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公开(公告)号: EP1522084B1公开(公告)日: 2011-11-16
- 发明人: CATTELINO, Mark J., , FRIEDLANDER, Fred I.,
- 申请人: Communications & Power Industries, Inc.
- 申请人地址: 811 Hansen Way, MS B-450 Palo Alto, CA 94303-1110 US
- 专利权人: Communications & Power Industries, Inc.
- 当前专利权人: Communications & Power Industries, Inc.
- 当前专利权人地址: 811 Hansen Way, MS B-450 Palo Alto, CA 94303-1110 US
- 代理机构: Falk, Urs
- 优先权: US192772 20020709
- 国际公布: WO2004006281 20040115
- 主分类号: H01J23/087
- IPC分类号: H01J23/087
摘要:
Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device (MBEBD). A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a (MBEBD). The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the (MBEBD). The flux plate includes apertures for each beam of the (MBEBD). A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps (MBEBD) have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the (MBEBD) as linear beams.
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