发明公开
- 专利标题: RETICLE CARRIER
- 专利标题(中): RETIKELTRûGER
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申请号: EP03742205申请日: 2003-06-26
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公开(公告)号: EP1535112A4公开(公告)日: 2008-01-16
- 发明人: WISEMAN BRIAN , STRIKE JUSTIN
- 申请人: ENTEGRIS INC
- 专利权人: ENTEGRIS INC
- 当前专利权人: ENTEGRIS INC
- 优先权: US19034702 2002-07-05
- 主分类号: G03B21/62
- IPC分类号: G03B21/62 ; G03F1/66 ; G03F7/20 ; G03B27/62
摘要:
A carrier for a reticle used in photolithographic semiconductor processing, having a base portion and a cover portion. The base portion has a plurality of reticle supports and a plurality of reticld positioning members. The cover portion is adapted to sealingly mate with the base portion, and has an inner surface with a plurality of spaced apart reticle restraints and a pair of reticle positioning tabs projecting inwardly therefrom. Each reticle positioning tab has a diagonal edge portion, and is oriented so that the diagonal edge portion urges a reticle resting on the reticle supports into engagement with the reticle restraints when the cover portion is mated with the base portion.
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