发明公开
- 专利标题: Stage apparatus and linear motor
- 专利标题(中): 载台装置及线性马达
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申请号: EP05075302.9申请日: 1996-10-04
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公开(公告)号: EP1536290A3公开(公告)日: 2005-07-06
- 发明人: Korenaga, Nobushige, Canon Kabushiki Kaisha , Ebinuma, Ryuichi, Canon Kabushiki Kaisha
- 申请人: Canon Kabushiki Kaisha
- 申请人地址: 3-20-2, Shimomaruko, Ohta-ku Tokyo JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: 3-20-2, Shimomaruko, Ohta-ku Tokyo JP
- 代理机构: Beresford, Keith Denis Lewis
- 优先权: JP28634595 19951009; JP19692496 19960709
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; H01L21/68
摘要:
It is an object to provide a compact, lightweight, and inexpensive stage apparatus. A stage apparatus for moving a stage (2) in a predetermined direction includes a stage accelerating/decelerating thrust generation unit (9) arranged along the moving direction, a stage speed control thrust generation unit (8) arranged to be parallel to the stage accelerating/decelerating thrust generation unit, an accelerating unit (29a) for generating a stage accelerating thrust at a portion corresponding to the stage accelerating interval of the accelerating/decelerating thrust generation unit (9), a decelerating unit (29b) for generating a stage decelerating thrust at a portion corresponding to the stage decelerating interval of the accelerating/decelerating thrust generation unit (9), and a speed control unit (28) for controlling the stage thrust generated by the speed control thrust generation unit (8) at least within a predetermined range between the accelerating interval and the decelerating interval.
公开/授权文献
- EP1536290A2 Stage apparatus and linear motor 公开/授权日:2005-06-01
信息查询
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