发明公开
EP1536290A3 Stage apparatus and linear motor 失效
载台装置及线性马达

Stage apparatus and linear motor
摘要:
It is an object to provide a compact, lightweight, and inexpensive stage apparatus. A stage apparatus for moving a stage (2) in a predetermined direction includes a stage accelerating/decelerating thrust generation unit (9) arranged along the moving direction, a stage speed control thrust generation unit (8) arranged to be parallel to the stage accelerating/decelerating thrust generation unit, an accelerating unit (29a) for generating a stage accelerating thrust at a portion corresponding to the stage accelerating interval of the accelerating/decelerating thrust generation unit (9), a decelerating unit (29b) for generating a stage decelerating thrust at a portion corresponding to the stage decelerating interval of the accelerating/decelerating thrust generation unit (9), and a speed control unit (28) for controlling the stage thrust generated by the speed control thrust generation unit (8) at least within a predetermined range between the accelerating interval and the decelerating interval.
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