发明公开
EP1544927A2 Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same 有权
一种压电元件,其制造方法,以及喷墨头,喷墨记录装置和角速度传感器具有相同的

Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same
摘要:
A piezoelectric element includes a first electrode (2); a piezoelectric layered film (10) composed of a first piezoelectric film (3) formed on the first electrode film and a second piezoelectric film (4) that is formed on the first piezoelectric film and is controlled in crystal orientation thereof by the first piezoelectric film; and a second electrode film (5) formed on the second piezoelectric film. Each of the first and second piezoelectric films is an aggregate of columnar grains grown unidirectionally along a thickness direction of the piezoelectric layered film. A columnar grain of the second piezoelectric film has a larger cross-sectional diameter than a columnar grain of the first piezoelectric film. A ratio l/d of the thickness l of the piezoelectric layered film to the cross-sectional diameter d of the second piezoelectric film is not less than 20 and not more than 60.
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